Preparation of atomically flat surfaces on silicon carbide using hydrogen etching

V. Ramachandran, M. F. Brady, A. R. Smith, and R. M. Feenstra 

Department of Physics, Carnegie Mellon University, Pittsburgh, PA 15213 


D. W. Greve
Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213




Published in J. Electron. Mater. 27, 308 (1998).

Link to Article on Springer website

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