A new high‐resolution two‐dimensional micropositioning device for scanning probe microscopy applications

A. R. Smith, S. Gwo, and C. K. Shih

Rev. Sci. Instrum. 65, 3216 (1994); doi:10.1063/1.1144552 (4 pages)

Copyright 1994 American Institute of Physics. This article may be downloaded for personal use only.
Any other use requires prior permission of the author and the American Institute of Physics.

The following article appeared in A. R. Smith et al., Rev. Sci. Instrum. 65, 3216 (1994)
and may be found at https://doi.org/10.1063/1.1144552.

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